VEECO K465 MOCVD FILTER (FOR VEECO EQUIPMENT).(MADE IN CHINA)

Airy Technolog Co., Ltd. offer all types MOCVD FILTERS to all over the world.

MOCVD (Metal Organic Chemical Vapor Deposition) is the industry leading technology for the fabrication of LED and power semiconductors. However, the MOCVD processes (SiC, GaAs, GaN, other compound semiconductor) produces powders and particulates when the exhaust gas flow to the low temperature(about 150 ℃) pipe and vacuum pump, which can cause unexpected and significant damage to costly vacuum pump equipment. To avoid contamination and extentd the maintenance time of the vacuum pump, we need a special filter which can bear hight temperature and can catch the small size particulateds.

Our MOCVD FILTERS had more than 10 years experience get used by more than 50 end users, in more than 500 MOCVD equipment every day in China domestic market, and also export to Japan used by famous LED and power semiconductor manufacuturers at there.

VEECO K465 MOCVD FILTER is designed for VEECO K465, K300 MOCVD equipment, the filter materials used high quality non-woven fabric, with high temperature resistance and no water absobent character, made it very good for MOCVD filter. Do not need pre vacuum treatment to absob the steam any more, save your time and your money.

Key Features:

1, the use of corrugated craft, filter area increased 15% than the traditional process, longer life time.

2, high qaulity non-woven fabric filtration materials, the gap is more uniform, more breathable, use of low pressure, effective protection of MOCVD equipment;

3, excellent strength, high temperature resistance, corrosion resistance, fit for the harsh environment

Typical application parameters:

1, working temperature: 100 ℃ ~ 500 ℃;

2, size: 365 * 110 * 600mm

3, life time :25-30 days (full run).

Remarks: Fit for VEECO K465 and K300 .