CT-500 MOCVD FILTER FOR AIXTRON EQUIPMENT.(MADE IN CHINA)

Airy Technolog Co., Ltd. offer all types MOCVD FILTERS to all over the world.

MOCVD (Metal Organic Chemical Vapor Deposition) is the industry leading technology for the fabrication of LED and power semiconductors. However, the MOCVD processes (SiC, GaAs, GaN, other compound semiconductor) produces powders and particulates when the exhaust gas flow to the low temperature(about 150 ℃) pipe and vacuum pump, which can cause unexpected and significant damage to costly vacuum pump equipment. To avoid contamination and extentd the maintenance time of the vacuum pump, we need a special filter which can bear hight temperature and can catch the small size particulateds.

Our MOCVD FILTERS had more than 10 years experience get used by more than 50 end users, in more than 500 MOCVD equipment every day in China domestic market, and also export to Japan used by famous LED and power semiconductor manufacuturers at there.

CT-500 is designed for AIXTRON MOCVD equipment, it can be used almost all types AIXTRON MOCVD equipment, it used high qulity glass fiber filter materials imported from USA and high quality SUS304 material.

Key Features:
1, using 24 fold corrugated craft, filter area increased 15% than the traditional type, stronger capacity for catching partical, longer life time.
2, special fiberglass filter materials, the gap is more uniform, more breathable, low pressure diffrence, protect MOCVD equipment well;
3, excellent strength, high temperature resistance, corrosion resistance, good for MOCVD exhaust filtration.

1, the working temperature: 300 ℃ ~ 900 ℃;
2, product specifications: L290 * OD150 *ID 60mm, L210*OD150*ID60mm
3, the proposed replacement cycle :25-30 days (full run).

FOR AIXTRON G3, G4, G5, Crius I, Crius 2, Crius 3